Invention Grant
- Patent Title: Interposer with lattice construction and embedded conductive metal structures
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Application No.: US14874393Application Date: 2015-10-03
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Publication No.: US09673064B2Publication Date: 2017-06-06
- Inventor: Jean Audet , Benjamin V. Fasano , Shidong Li
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Steven J. Meyers
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L21/02 ; H01L21/768 ; H01L21/48 ; H01L23/498 ; H01L23/15 ; H01L21/027 ; H01L25/065

Abstract:
A lattice structure is formed in a non-silicon interposer substrate to create large cells that are multiples of through hole pitches to act as islands for dielectric fields. Each unit cell is then filled with a dielectric material. Thereafter, holes (i.e., through holes or blind holes) are created within the dielectric material in the cells. After hole formation, a conductive metal is formed into each of the holes providing an interposer. This method can enable fine pitch processing in organic-based materials, isolates the thermal coefficient of expansion (TCE) stress from metal vias to low TCE carriers and creates a path to high volume, low costs components in panel form.
Public/Granted literature
- US20160172290A1 INTERPOSER WITH LATTICE CONSTRUCTION AND EMBEDDED CONDUCTIVE METAL STRUCTURES Public/Granted day:2016-06-16
Information query
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