Invention Grant
- Patent Title: Laser apparatus and extreme ultraviolet light generation system
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Application No.: US14748332Application Date: 2015-06-24
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Publication No.: US09667019B2Publication Date: 2017-05-30
- Inventor: Masato Moriya , Takashi Suganuma , Osamu Wakabayashi
- Applicant: GIGAPHOTON INC.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: JP2013-017272 20130131
- Main IPC: H01S3/00
- IPC: H01S3/00 ; H05G2/00 ; H01S3/223 ; H01S3/23
Abstract:
There may be included: a master oscillator configured to output pulsed laser light; two or more power amplifiers disposed in an optical path of the pulsed laser light to amplify the pulsed laser light; and an optical isolator provided between adjacent two of the power amplifiers in the optical path of the pulsed laser light, and configured to suppress transmission of light traveling from the power amplifiers to a side where the master oscillator is provided.
Public/Granted literature
- US20150340838A1 LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM Public/Granted day:2015-11-26
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