Invention Grant
- Patent Title: Electrostatic quadrupole deflector for microcolumn
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Application No.: US14631330Application Date: 2015-02-25
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Publication No.: US09666407B2Publication Date: 2017-05-30
- Inventor: Tae Sik Oh , Ho Seob Kim , Dae Wook Kim
- Applicant: Tae Sik Oh , Ho Seob Kim , Dae Wook Kim
- Applicant Address: KR Asan-si, Chungcheongnam-Do
- Assignee: INDUSTRY-UNIVERSITY COOPERATION FOUNDATION SUNMOON UNIVERSITY
- Current Assignee: INDUSTRY-UNIVERSITY COOPERATION FOUNDATION SUNMOON UNIVERSITY
- Current Assignee Address: KR Asan-si, Chungcheongnam-Do
- Agency: Park Law Firm
- Agent John K. Park
- Main IPC: H01J37/147
- IPC: H01J37/147 ; H01J37/073 ; H01J37/26 ; H01J9/02
Abstract:
Disclosed is an electrostatic quadrupole deflector for a microcolumn. The deflector includes an electron beam passage hole, deflecting electrodes to which a deflection voltage is applied, and floating electrodes to which the deflection voltage is not applied. The deflector is structurally stable and has a simple driving system. The deflector has good performance and characteristics.
Public/Granted literature
- US20160247659A1 Electrostatic Quadrupole Deflector for Microcolumn Public/Granted day:2016-08-25
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