Invention Grant
- Patent Title: Method and system for reducing charging artifacts in scanning electron microscopy images
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Application No.: US15058062Application Date: 2016-03-01
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Publication No.: US09653257B2Publication Date: 2017-05-16
- Inventor: Christopher Sears , Ben Clarke
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: H01J37/28
- IPC: H01J37/28 ; H01J37/26

Abstract:
A scanning electron microscopy system for mitigating charging artifacts includes a scanning electron microscopy sub-system for acquiring multiple images from a sample. The images include one or more sets of complementary images. The one or more sets of complementary images include a first image acquired along a first scan direction and a second image acquired along a second scan direction opposite to the first scan direction. The system includes a controller communicatively coupled to the scanning electron microscopy sub-system. The controller is configured to receive images of the sample from the scanning electron microscopy sub-system. The controller is further configured to generate a composite image by combining the one or more sets of complementary images.
Public/Granted literature
- US20160260576A1 Method and System for Reducing Charging Artifacts in Scanning Electron Microscopy Images Public/Granted day:2016-09-08
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