Invention Grant
- Patent Title: Semiconductor device and method of providing z-interconnect conductive pillars with inner polymer core
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Application No.: US14224931Application Date: 2014-03-25
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Publication No.: US09640504B2Publication Date: 2017-05-02
- Inventor: Reza A. Pagaila , Byung Tai Do , Shuangwu Huang
- Applicant: STATS ChipPAC, Ltd.
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins and Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L23/00 ; H01L23/528 ; H01L23/538 ; H01L21/56 ; H01L21/683 ; H01L23/31 ; H01L25/10 ; H01L25/16

Abstract:
A semiconductor device is made by providing a sacrificial substrate and depositing an adhesive layer over the sacrificial substrate. A first conductive layer is formed over the adhesive layer. A polymer pillar is formed over the first conductive layer. A second conductive layer is formed over the polymer pillar to create a conductive pillar with inner polymer core. A semiconductor die or component is mounted over the substrate. An encapsulant is deposited over the semiconductor die or component and around the conductive pillar. A first interconnect structure is formed over a first side of the encapsulant. The first interconnect structure is electrically connected to the conductive pillar. The sacrificial substrate and adhesive layers are removed. A second interconnect structure is formed over a second side of the encapsulant opposite the first interconnect structure. The second interconnect structure is electrically connected to the conductive pillar.
Public/Granted literature
- US20140203443A1 Semiconductor Device and Method of Providing Z-Interconnect Conductive Pillars with Inner Polymer Core Public/Granted day:2014-07-24
Information query
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