A high-order harmonic wave generation apparatus using a diode-pumped solid state laser includes a pump head for generating a fundamental wave, Porro prisms disposed on the left and right sides of the pump head, nonlinear crystals for sequentially generating a second-order harmonic wave, a fourth-order harmonic wave, and a fifth-order harmonic wave from the fundamental wave, and a final emission unit for reflecting and transmitting any one of the second-order harmonic wave, the fourth-order harmonic wave, and the fifth-order harmonic wave and for emitting the harmonic wave without changing the optical path. Accordingly, the apparatus is insensitive to changes in the external environment through a resonator having a structure comprising Porro prisms, and enables the final emission unit to selectively output the fourth-order harmonic wave or the fifth-order harmonic wave.