Invention Grant
- Patent Title: Conductive pattern and manufacturing method thereof
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Application No.: US14080980Application Date: 2013-11-15
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Publication No.: US09615450B2Publication Date: 2017-04-04
- Inventor: Ji-Young Hwang , In-Seok Hwang , Dong-Wook Lee , Min-Choon Park , Seung-Heon Lee , Sang-Ki Chun , Yong-Koo Son , Beom-Mo Koo
- Applicant: LG CHEM, LTD.
- Applicant Address: KR Seoul
- Assignee: LG CHEM, LTD.
- Current Assignee: LG CHEM, LTD.
- Current Assignee Address: KR Seoul
- Agency: Dentons US LLP
- Priority: KR10-2009-0009750 20090206; KR10-2009-0127756 20091221
- Main IPC: H05K1/02
- IPC: H05K1/02 ; H05K3/10 ; G06F3/045 ; H01L31/0224 ; H05K3/06 ; G03F7/40 ; H05K3/00

Abstract:
The present invention provides a method for manufacturing a conductive pattern, comprising the steps of: a) forming a conductive film on a substrate; b) forming an etching resist pattern on the conductive film; and c) forming a conductive pattern having a smaller line width than a width of the etching resist pattern by over-etching the conductive film by using the etching resist pattern, and a conductive pattern manufactured by using the same. According to the exemplary embodiment of the present invention, it is possible to effectively and economically provide a conductive pattern having a ultrafine line width.
Public/Granted literature
- US20140151109A1 CONDUCTIVE PATTERN AND MANUFACTURING METHOD THEREOF Public/Granted day:2014-06-05
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