发明授权
- 专利标题: Immersion de-taping
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申请号: US14158503申请日: 2014-01-17
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公开(公告)号: US09613845B2公开(公告)日: 2017-04-04
- 发明人: Ching Tasi Liu , Fu-Chen Chang , Chien-Chen Li , Te Lung Liu , Kuo Liang Lu
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Slater Matsil, LLP
- 主分类号: B29C65/50
- IPC分类号: B29C65/50 ; B32B37/12 ; B32B38/10 ; B32B39/00 ; H01L21/683
摘要:
Embodiments using immersion de-taping are described. A substrate having a substrate tape attached thereto is provided. The substrate includes electrically conductive connectors attached to the substrate tape. A fluid is provided between the substrate and the substrate tape. While the fluid is between the substrate and the substrate tape, the substrate tape is removed from the substrate. Another embodiment is an apparatus comprising an immersion tank, a substrate chuck, first and second fixed rollers, and a moveable roller. The substrate chuck is configured to secure a substrate and to place the substrate into the immersion tank. The first fixed roller is operable to dispense a clamp tape. The second fixed roller is operable to roll the clamp tape. The moveable roller is operable to extend into the immersion tank and to adhere the clamp tape to a substrate tape on the substrate.
公开/授权文献
- US20150206784A1 IMMERSION DE-TAPING 公开/授权日:2015-07-23
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