Invention Grant
- Patent Title: Illumination optics and projection exposure apparatus
- Patent Title (中): 照明光学和投影曝光装置
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Application No.: US14200199Application Date: 2014-03-07
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Publication No.: US09588431B2Publication Date: 2017-03-07
- Inventor: Artur Hoegele , Markus Deguenther
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102008007449 20080201
- Main IPC: G03B27/42
- IPC: G03B27/42 ; G03F7/20

Abstract:
An illumination optics illuminates an object field of a projection exposure apparatus for microlithography. The illumination optics include a condenser group of optical components which guide a bundle of useful light. An objective group of bundle-guiding components is arranged downstream of the condenser group. At least one component of the condenser group and at least one component of the objective group are displaceable for compensation of deviations of the object field, which is in an actual illumination state, from a desired illumination state.
Public/Granted literature
- US20140185027A1 ILLUMINATION OPTICS AND PROJECTION EXPOSURE APPARATUS Public/Granted day:2014-07-03
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