Invention Grant
US09588431B2 Illumination optics and projection exposure apparatus 有权
照明光学和投影曝光装置

Illumination optics and projection exposure apparatus
Abstract:
An illumination optics illuminates an object field of a projection exposure apparatus for microlithography. The illumination optics include a condenser group of optical components which guide a bundle of useful light. An objective group of bundle-guiding components is arranged downstream of the condenser group. At least one component of the condenser group and at least one component of the objective group are displaceable for compensation of deviations of the object field, which is in an actual illumination state, from a desired illumination state.
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