Invention Grant
- Patent Title: TMR device with novel free layer structure
- Patent Title (中): TMR器件具有新颖的自由层结构
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Application No.: US14712942Application Date: 2015-05-15
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Publication No.: US09577184B2Publication Date: 2017-02-21
- Inventor: Tong Zhao , Hui-Chuan Wang , Yu-Chen Zhou , Min Li , Kunliang Zhang
- Applicant: Headway Technologies, Inc.
- Applicant Address: US CA Milpitas
- Assignee: Headway Technologies, Inc.
- Current Assignee: Headway Technologies, Inc.
- Current Assignee Address: US CA Milpitas
- Agency: Saile Ackerman LLC
- Agent Stephen B. Ackerman
- Main IPC: H01L43/12
- IPC: H01L43/12 ; G01R33/00 ; B82Y10/00 ; B82Y25/00 ; G01R33/09 ; G11B5/39 ; H01L43/10

Abstract:
A TMR sensor that includes a free layer having at least one B-containing (BC) layer made of CoFeB, CoFeBM, CoB, CoBM, or CoBLM, and a plurality of non-B containing (NBC) layers made of CoFe, CoFeM, or CoFeLM is disclosed where L and M are one of Ni, Ta, Ti, W, Zr, Hf, Tb, or Nb. One embodiment is represented by (NBC/BC)n where n≧2. A second embodiment is represented by (NBC/BC)n/NBC where n≧1. In every embodiment, a NBC layer contacts the tunnel barrier and NBC layers each with a thickness from 2 to 8 Angstroms are formed in alternating fashion with one or more BC layers each 10 to 80 Angstroms thick. Total free layer thickness is
Public/Granted literature
- US20150248902A1 TMR Device with Novel Free Layer Structure Public/Granted day:2015-09-03
Information query
IPC分类: