发明授权
- 专利标题: Method for manufacturing the magnetic field sensor module
- 专利标题(中): 磁场传感器模块的制造方法
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申请号: US15215631申请日: 2016-07-21
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公开(公告)号: US09570676B2公开(公告)日: 2017-02-14
- 发明人: Stefan Kolb , Klemens Pruegl , Juergen Zimmer
- 申请人: Infineon Technologies AG
- 申请人地址: DE Neubiberg
- 专利权人: Infineon Technologies AG
- 当前专利权人: Infineon Technologies AG
- 当前专利权人地址: DE Neubiberg
- 代理机构: Eschweiler & Associates, LLC
- 优先权: DE102005008368 20050223; DE102005047414 20051004
- 主分类号: H01L43/12
- IPC分类号: H01L43/12 ; H01L43/14 ; H01L43/04 ; H01L43/06 ; H01L43/08
摘要:
In the method of manufacturing a magnetoresistive sensor module, at first a composite arrangement out of a semiconductor substrate and a metal-insulator arrangement is provided, wherein a semiconductor circuit arrangement is integrated adjacent to a main surface of the semiconductor substrate into the same, wherein the metal-insulator arrangement is arranged on the main surface of the semiconductor substrate and comprises a structured metal sheet and insulation material at least partially surrounding the structured metal sheet, wherein the structured metal sheet is electrically connected to the semiconductor circuit arrangement. Then, a magnetoresistive sensor structure is applied onto a surface of the insulation material of the composite arrangement, and finally an electrical connection between the magnetoresistive sensor structure and the structured metal sheet is established, so that the magnetoresistive sensor structure is connected to the integrated circuit arrangement.
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