发明授权
US09570573B1 Self-aligned gate tie-down contacts with selective etch stop liner
有权
具有选择性蚀刻停止衬垫的自对准栅极接合触点
- 专利标题: Self-aligned gate tie-down contacts with selective etch stop liner
- 专利标题(中): 具有选择性蚀刻停止衬垫的自对准栅极接合触点
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申请号: US14822490申请日: 2015-08-10
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公开(公告)号: US09570573B1公开(公告)日: 2017-02-14
- 发明人: Su Chen Fan , Lars W. Liebmann , Ruilong Xie
- 申请人: GLOBALFOUNDRIES, INC.
- 申请人地址: KY Grand Cayman
- 专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Hoffman Warnick, LLC
- 代理商 David Cain
- 主分类号: H01L29/45
- IPC分类号: H01L29/45 ; H01L21/768 ; H01L29/66 ; H01L21/3105
摘要:
A method for forming a gate tie-down includes exposing an active area to form trench contact openings and forming trench contacts therein. An etch stop layer is formed on the trench contacts and on spacers of adjacent gate structures. An interlevel dielectric (ILD) is deposited to fill over the etch stop layer. The ILD and the etch stop layer on one side of the gate structure are opened up to provide an exposed etch stop layer portion. The gate structure is recessed to expose a gate conductor. The exposed etch stop layer portion is removed. A conductive material is deposited to provide a self-aligned contact down to the trench contact on the one side of the gate structure, to form a gate contact down to the gate conductor and to form a horizontal connection within the ILD over the active area between the gate conductor and the self-aligned contact.
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