发明授权
- 专利标题： Substrate transfer system and substrate processing system
- 专利标题（中）： 基板转印系统和基板处理系统
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申请号： US15016272申请日： 2016-02-05
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公开(公告)号： US09570336B2公开(公告)日： 2017-02-14
- 发明人: Masatoshi Furuichi , Yoshiki Kimura
- 申请人： KABUSHIKI KAISHA YASKAWA DENKI
- 申请人地址： JP Kitakyushu-shi
- 专利权人： KABUSHIKI KAISHA YASKAWA DENKI
- 当前专利权人： KABUSHIKI KAISHA YASKAWA DENKI
- 当前专利权人地址： JP Kitakyushu-shi
- 代理机构： Mori & Ward, LLP
- 主分类号： H01L21/677
- IPC分类号： H01L21/677 ; H01L21/687
摘要：
A substrate transfer system includes a substrate transfer robot. The substrate transfer robot is provided between a first apparatus and a second apparatus which has a wall provided opposite to the substrate transfer robot and having an opening on the wall. The substrate transfer robot is configured to transfer a substrate from the first apparatus to the second apparatus via the opening and includes a base having a first axis, an arm body, and a hand. The arm body has a proximal end and a distal end and is connected to the base at the proximal end to rotate around the first axis. The substrate transfer robot includes a minimum distance from the first axis to an outermost portion of the arm body and the hand in a radius direction from the first axis being larger than a distance between the first axis and the opening on the wall.
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