发明授权
- 专利标题: Structure and formation method of semiconductor device structure
- 专利标题(中): 半导体器件结构的结构和形成方法
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申请号: US14725118申请日: 2015-05-29
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公开(公告)号: US09559205B2公开(公告)日: 2017-01-31
- 发明人: Che-Cheng Chang , Jui-Ping Chuang , Chen-Hsiang Lu , Wei-Ting Chen , Yu-Cheng Liu
- 申请人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Slater Matsil, LLP
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L29/66
摘要:
Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a fin structure over a semiconductor substrate and a gate stack covering a portion of the fin structure. The gate stack includes a work function layer and a gate dielectric layer. The semiconductor device structure also includes an isolation element over the semiconductor substrate and adjacent to the gate stack. The isolation element is in direct contact with the work function layer and the gate dielectric layer, and a lower width of the isolation element is greater than an upper width of the isolation element.
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