发明授权
- 专利标题: Optical module and production method for same
- 专利标题(中): 光模块及其制作方法相同
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申请号: US14117396申请日: 2012-04-04
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公开(公告)号: US09557555B2公开(公告)日: 2017-01-31
- 发明人: Yoshihisa Warashina , Tomofumi Suzuki , Kohei Kasamori
- 申请人: Yoshihisa Warashina , Tomofumi Suzuki , Kohei Kasamori
- 申请人地址: JP Hamamatsu-shi
- 专利权人: HAMAMATSU PHOTONICS K.K.
- 当前专利权人: HAMAMATSU PHOTONICS K.K.
- 当前专利权人地址: JP Hamamatsu-shi
- 代理机构: Drinker Biddle & Reath LLP
- 优先权: JP2011-109686 20110516
- 国际申请: PCT/JP2012/059226 WO 20120404
- 国际公布: WO2012/157357 WO 20121122
- 主分类号: G02B26/00
- IPC分类号: G02B26/00 ; G02B26/08 ; G01B9/02 ; G02B5/08 ; G01J3/453
摘要:
An optical module includes a first plate-shaped member having a light transmissive optical component which is formed by applying etching to a silicon region, and a second plate-shaped member having light reflective optical components (mirrors) for reflecting light transmitting through the light transmissive optical component. The first and second plate-shaped members are bonded to one another, and an optical path for light transmitting through the light transmissive optical component is along a component forming surface of the first plate-shaped member and a principal surface of the second plate-shaped member. Thereby, realizing an optical module in which it is possible to dispose the light reflective optical component and the light transmissive optical component close to one another, and a manufacturing method for the optical module.
公开/授权文献
- US20140139924A1 OPTICAL MODULE AND PRODUCTION METHOD FOR SAME 公开/授权日:2014-05-22
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