发明授权
US09534949B2 Pre-collapsed capacitive micro-machined transducer cell with stress layer
有权
具有应力层的预折叠电容微加工换能器单元
- 专利标题： Pre-collapsed capacitive micro-machined transducer cell with stress layer
- 专利标题（中）： 具有应力层的预折叠电容微加工换能器单元
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申请号： US14349077申请日： 2012-10-26
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公开(公告)号： US09534949B2公开(公告)日： 2017-01-03
- 发明人: Peter Dirksen , Ronald Dekker , Vincent Adrianus Henneken , Adriaan Leeuwestein , Bout Marcelis , John Douglas Fraser
- 申请人： KONINKLIJKE PHILIPS N.V.
- 申请人地址： NL Eindhoven
- 专利权人： KONINKLIJKE PHILIPS N.V.
- 当前专利权人： KONINKLIJKE PHILIPS N.V.
- 当前专利权人地址： NL Eindhoven
- 国际申请： PCT/IB2012/055919 WO 20121026
- 国际公布： WO2013/061298 WO 20130502
- 主分类号： G01H9/00
- IPC分类号： G01H9/00 ; B06B1/02
摘要：
The present invention relates to a pre-collapsed capacitive micro-machined transducer cell (10) comprising a substrate (12), and a membrane (14) disposed above a total membrane area (Atotal), wherein a cavity (20) is formed between the membrane (14) and the substrate (12), the membrane comprising a hole (15) and an edge portion (14a) surrounding the hole (15). The cell (10) further comprises a stress layer (17) on the membrane (14), the stress layer (17) having a predetermined stress value with respect to the membrane (14), the stress layer (17) being adapted to provide a bending moment on the membrane (14) in a direction towards the substrate (12) such that the edge portion (14a) of the membrane (14) is collapsed to the substrate (12). The present invention further relates to a method of manufacturing such pre-collapsed capacitive micro-machined transducer cell (10).
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