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US09515212B2 Solar cell and method for manufacturing with pre-amorphization implant to form emitter 有权
太阳能电池和用于制造前非晶化植入物以形成发射体的方法

Solar cell and method for manufacturing with pre-amorphization implant to form emitter
Abstract:
A method for manufacturing a solar cell includes preparing a semiconductor substrate having a first conductivity type dopant; ion-implanting a pre-amorphization elements into a front surface of the semiconductor substrate to form an amorphous layer; and forming an emitter layer by ion-implanting second conductivity type dopant into the front surface of the semiconductor substrate. The method then further includes heat-treating the layers to activate the second conductivity type dopant. The method further includes forming a back surface field layer at a back surface of the semiconductor substrate by ion-implanting a first conductivity type dopant.
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