发明授权
US09496254B2 Capacitor using middle of line (MOL) conductive layers 有权
使用中线(MOL)导电层的电容器

Capacitor using middle of line (MOL) conductive layers
摘要:
A method for fabricating a metal-insulator-metal (MIM) capacitor includes depositing a first middle of line (MOL) conductive layer over a shallow trench isolation (STI) region of a semiconductor substrate. The first MOL conductive layer provides a first plate of the MIM capacitor as well as a first set of local interconnects to source and drain regions of a semiconductor device. The method also includes depositing an insulator layer on the first MOL conductive layer as a dielectric layer of the MIM capacitor. The method further includes depositing a second MOL conductive layer on the insulator layer as a second plate of the MIM capacitor.
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