发明授权
- 专利标题: Buried signal transmission line
- 专利标题(中): 埋地信号传输线
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申请号: US14307604申请日: 2014-06-18
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公开(公告)号: US09484246B2公开(公告)日: 2016-11-01
- 发明人: Anthony I. Chou , Arvind Kumar , Sungjae Lee , Richard A. Wachnik
- 申请人: GLOBALFOUNDRIES INC.
- 申请人地址: KY Grand Cayman
- 专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 主分类号: H01L21/20
- IPC分类号: H01L21/20 ; H01L21/762 ; H01L21/84 ; H01L21/74 ; H01L27/12
摘要:
A buried conductive layer is formed underneath a buried insulator layer of a semiconductor-on-insulator (SOI) substrate. A deep isolation trench laterally surrounding a portion of the buried conductive layer is formed, and is filled with at least a dielectric liner to form a deep capacitor trench isolation structure. Contact via structures are formed through the buried insulator layer and a top semiconductor layer and onto the portion of the buried conductive layer, which constitutes a buried conductive conduit. The deep capacitor trench isolation structure may be formed concurrently with at least one deep trench capacitor. A patterned portion of the top semiconductor layer may be employed as an additional conductive conduit for signal transmission. Further, the deep capacitor trench isolation structure may include a conductive portion, which can be electrically biased to control the impedance of the signal path including the buried conductive conduit.
公开/授权文献
- US20150371893A1 BURIED SIGNAL TRANSMISSION LINE 公开/授权日:2015-12-24
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