发明授权
- 专利标题: Schottky diode and method for making it
- 专利标题(中): 肖特基二极管及其制作方法
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申请号: US13435221申请日: 2012-03-30
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公开(公告)号: US09472687B2公开(公告)日: 2016-10-18
- 发明人: Stefan Starovecky , Olga Krempaska , Martin Predmersky
- 申请人: Stefan Starovecky , Olga Krempaska , Martin Predmersky
- 申请人地址: DE Nürnberg
- 专利权人: Semikron Elektronik GmbH & Co., KG
- 当前专利权人: Semikron Elektronik GmbH & Co., KG
- 当前专利权人地址: DE Nürnberg
- 代理机构: The Law Offices of Roger S. Thompson
- 优先权: DE102011006492 20110331
- 主分类号: H01L21/265
- IPC分类号: H01L21/265 ; H01L21/44 ; H01L21/18 ; H01L29/872 ; H01L29/06 ; H01L29/47
摘要:
A Schottky diode and a method for making one. The method includes the following steps: providing a semiconductor base body, preferably in the form of a wafer, having a high dopant concentration and having a first main surface, which forms the first electrical contact surface of the Schottky diode; epitaxially depositing a semiconductor layer having the same conductivity and a lower dopant concentration on that surface of the semiconductor base body which lies opposite the first main surface; arranging a first metal layer on the semiconductor layer with the formation of a Schottky contact between the first metal layer and the semiconductor layer; connecting a planar contact body to the first metal layer by means of a connecting means; forming at least one individual Schottky diode; and arranging a passivation layer in the edge region of the at least one Schottky diode.
公开/授权文献
- US20120256288A1 Schottky Diode and Method for Making It 公开/授权日:2012-10-11
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