发明授权
- 专利标题: Ultra-low oxygen and humility loadport and stocker system
- 专利标题(中): 超低氧和谦卑的装载和储存系统
-
申请号: US14052231申请日: 2013-10-11
-
公开(公告)号: US09460949B2公开(公告)日: 2016-10-04
- 发明人: You-Hua Chou , Chih-Wei Huang , Kuo-Sheng Chuang
- 申请人: Taiwan Semiconductor Manufacturing Company Limited
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company Limited
- 当前专利权人: Taiwan Semiconductor Manufacturing Company Limited
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Cooper Legal Group, LLC
- 主分类号: B65B31/00
- IPC分类号: B65B31/00 ; H01L21/673
摘要:
One or more apparatuses for adjusting at least one of an oxygen content or a water content in a pod and methods of their use are provided, where one or more semiconductor wafer are selectively stored within a storage chamber of the pod. The apparatus comprises the pod and a pipeline. The pod comprises the storage chamber and a port. The port comprises a receptacle having a first opening and a constraining ring proximate the first opening. The pipeline comprises a pipe, a diffuser attached to a first end of the pipe and a controller attached to a second end of the pipe.
公开/授权文献
信息查询