发明授权
- 专利标题: Substrate treating apparatus and method of treating substrate
- 专利标题(中): 底物处理装置及其处理方法
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申请号: US14746950申请日: 2015-06-23
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公开(公告)号: US09460944B2公开(公告)日: 2016-10-04
- 发明人: Naozumi Fujiwara , Toru Edo , Jun Sawashima , Tatsumi Shimomura
- 申请人: SCREEN Holdings Co., Ltd.
- 申请人地址: JP Kyoto
- 专利权人: SCREEN Holdings Co., Ltd.
- 当前专利权人: SCREEN Holdings Co., Ltd.
- 当前专利权人地址: JP Kyoto
- 代理机构: Ostrolenk Faber LLP
- 优先权: JP2014-136496 20140702; JP2014-136497 20140702; JP2014-140194 20140708
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; H01L21/02 ; H01L21/324 ; H01L21/66
摘要:
A substrate treating apparatus includes a rotating and holding unit that rotates a substrate, a first supply source that supplies first pure water having a first temperature, a second supply source that supplies second pure water having a second temperature higher than the first temperature, a treatment solution supply unit that supplies a treatment solution to a central section of an upper surface of the substrate, a first supply unit that supplies a first liquid containing the first pure water to a central section of a lower surface of the substrate, a second supply unit that supplies a second liquid containing the second pure water to a peripheral section and an intermediate section of the lower surface, and a heat amount control unit that independently controls an amount of heat to be supplied by the first supply unit and an amount of heat to be supplied by the second supply unit.
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