Invention Grant
- Patent Title: Memory structure having top electrode with protrusion
- Patent Title (中): 记忆结构,具有突出的顶部电极
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Application No.: US14457170Application Date: 2014-08-12
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Publication No.: US09450183B2Publication Date: 2016-09-20
- Inventor: Jian-Shiou Huang , Yao-Wen Chang , Hsing-Lien Lin , Cheng-Yuan Tsai , Chia-Shiung Tsai
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Associates, LLC
- Main IPC: H01L47/00
- IPC: H01L47/00 ; H01L45/00

Abstract:
The present disclosure relates to an RRAM (resistive random access memory) cell having a top electrode with a geometry configured to improve the electric performance of the RRAM cell, and an associated method of formation. In some embodiments, the RRAM cell has a lower insulating layer with a micro-trench located over a lower metal interconnect layer disposed within a lower inter-level dielectric (ILD) layer that overlies a semiconductor substrate. A bottom electrode is disposed over the micro-trench, and a dielectric data storage layer is located over the bottom electrode. A top electrode is disposed over the dielectric data storage layer. The top electrode has a protrusion that extends outward from a bottom surface of the top electrode at a position overlying the micro-trench. The protrusion generates a region having an enhanced electric field within the dielectric data storage layer, which improves performance of the RRAM cell.
Public/Granted literature
- US20160049583A1 MEMORY STRUCTURE HAVING TOP ELECTRODE WITH PROTRUSION Public/Granted day:2016-02-18
Information query
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