Invention Grant
- Patent Title: Clamping mechanism for processing of a substrate within a substrate carrier
- Patent Title (中): 用于处理衬底载体内的衬底的夹持机构
-
Application No.: US14179779Application Date: 2014-02-13
-
Publication No.: US09443819B2Publication Date: 2016-09-13
- Inventor: Gerard Anthony C. Afable , Howell John Chua Toc , Prakash Venkatesappa , Kok Peng Teo , Annabelle Q. Yang
- Applicant: Apple Inc.
- Applicant Address: US CA Cupertino
- Assignee: Apple Inc.
- Current Assignee: Apple Inc.
- Current Assignee Address: US CA Cupertino
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L27/146

Abstract:
A method and clamping apparatus for securing a substrate within a substrate carrier during an ultrasonic mounting process. The clamping apparatus may include a substrate carrier having a top plate and a bottom plate, the top plate and the bottom plate forming a cavity dimensioned to hold a substrate. A clamping plate is positioned on a side of the top plate opposite the bottom plate, the clamping plate having an opening aligned with the cavity and a pair of clamping members, each of the pair of clamping members extending toward a center of the opening and through the cavity such that the clamping member presses portions of the substrate exposed through the opening against the bottom plate. The method may include providing a clamping plate having an opening configured for alignment with a cavity formed in a substrate carrier and mounting a pair of resilient arms to the clamping plate.
Public/Granted literature
- US20150228529A1 CLAMPING MECHANISM FOR PROCESSING OF A SUBSTRATE WITHIN A SUBSTRATE CARRIER Public/Granted day:2015-08-13
Information query
IPC分类: