Invention Grant
- Patent Title: Variable spacing four-point probe pin device and method
- Patent Title (中): 可变间距四点探针引脚器件及方法
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Application No.: US13888201Application Date: 2013-05-06
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Publication No.: US09435826B2Publication Date: 2016-09-06
- Inventor: Walter H. Johnson , Jianou Shi , Lansheng Dong , Haijing Peng , Xianghua Liu , Jiazhou Jin , Zhuoxian Zhang , Nanchang Zhu
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Simpson & Simpson, PLLC
- Main IPC: G01R31/20
- IPC: G01R31/20 ; G01R1/067 ; G01R1/073

Abstract:
A continuous variable spacing probe pin device, including first and second probe pins. The first and second probe pins are configured to measure a property of a conductive layer. In a first configuration, the first and second probe pins include respective first portions arranged to contact the conductive layer to measure the property. In a second configuration, the first and second probe pins include respective second portions arranged to contact the conductive layer to measure the property. A first area for each respective first portion is different from a second area for each respective second portion.
Public/Granted literature
- US20130300445A1 VARIABLE SPACING FOUR-POINT PROBE PIN DEVICE AND METHOD Public/Granted day:2013-11-14
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