Invention Grant
US09435826B2 Variable spacing four-point probe pin device and method 有权
可变间距四点探针引脚器件及方法

Variable spacing four-point probe pin device and method
Abstract:
A continuous variable spacing probe pin device, including first and second probe pins. The first and second probe pins are configured to measure a property of a conductive layer. In a first configuration, the first and second probe pins include respective first portions arranged to contact the conductive layer to measure the property. In a second configuration, the first and second probe pins include respective second portions arranged to contact the conductive layer to measure the property. A first area for each respective first portion is different from a second area for each respective second portion.
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