发明授权
US09425026B2 Systems and methods for improved radio frequency matching networks 有权
改进射频匹配网络的系统和方法

Systems and methods for improved radio frequency matching networks
摘要:
Systems and methods are provided for matching the impedance of a load to an impedance of a power generator. Embodiments include a matching network with a dynamically configurable component assembly array couplable to the variable impedance load and the RF power generator, wherein the component assembly array includes one or more tune and load electrical components. The component assembly array is adapted to be configured for each recipe step, and at least one of the electrical components is a variable impedance component adjustable to reduce RF energy reflected from the variable impedance load for each recipe step. Numerous other aspects are provided.
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