发明授权
- 专利标题: Systems and methods for improved radio frequency matching networks
- 专利标题(中): 改进射频匹配网络的系统和方法
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申请号: US14815947申请日: 2015-07-31
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公开(公告)号: US09425026B2公开(公告)日: 2016-08-23
- 发明人: Suhail Anwar , Carl A. Sorensen , Jozef Kudela
- 申请人: Applied Materials, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc
- 当前专利权人: Applied Materials, Inc
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Dugan & Dugan, PC
- 主分类号: H01J7/24
- IPC分类号: H01J7/24 ; H05B31/26 ; H01J37/32 ; H03H7/40
摘要:
Systems and methods are provided for matching the impedance of a load to an impedance of a power generator. Embodiments include a matching network with a dynamically configurable component assembly array couplable to the variable impedance load and the RF power generator, wherein the component assembly array includes one or more tune and load electrical components. The component assembly array is adapted to be configured for each recipe step, and at least one of the electrical components is a variable impedance component adjustable to reduce RF energy reflected from the variable impedance load for each recipe step. Numerous other aspects are provided.
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