发明授权
- 专利标题: Memory device
- 专利标题(中): 内存设备
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申请号: US14841373申请日: 2015-08-31
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公开(公告)号: US09406721B1公开(公告)日: 2016-08-02
- 发明人: Kazuhiko Yamamoto , Kunifumi Suzuki
- 申请人: KABUSHIKI KAISHA TOSHIBA
- 申请人地址: JP Toky
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Toky
- 代理机构: Patterson & Sheridan, LLP
- 优先权: JP2015-071446 20150331
- 主分类号: H01L47/00
- IPC分类号: H01L47/00 ; H01L27/24 ; H01L45/00
摘要:
A memory device includes a bit line extending in a first direction, a word line extending in a second direction crossing the first direction, an insulating material between the word line and another word line, a first layer made of a Group IV element, between the word line and the insulating material and between the word line and the bit line, and a second layer made of a compound of a Group V element and a Group VI element, between the insulating material and the bit line. The word line includes a first portion that is metallic and a second portion between the first portion and the first layer. In addition, a variable resistance portion in contact with the first and second layers and the second portion of the word line, contains the Group IV element and the compound of the Group V element and the Group VI element.
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