- 专利标题: Solid-state imaging device, members for the same, and imaging system
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申请号: US14824903申请日: 2015-08-12
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公开(公告)号: US09397132B2公开(公告)日: 2016-07-19
- 发明人: Masahiro Kobayashi
- 申请人: CANON KABUSHIKI KAISHA
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 代理机构: Canon USA, Inc. IP Division
- 优先权: JP2010-149485 20100630
- 主分类号: H01L27/14
- IPC分类号: H01L27/14 ; H01L27/146 ; H01L23/48
摘要:
The present invention provides a solid-state imaging device including a pad capable of reducing inferior connection with an external terminal. The solid-state imaging device includes a first substrate provided, on its front face, with photoelectric conversion elements, a first wiring structure, a second substrate provided, on its front face, with at least a part of peripheral circuits, and a second wiring structure. The first substrate, the first wiring structure, the second wiring structure, and the second substrate are provided in this order. The first wiring structure includes a wiring layer including wirings made mainly of copper. The second wiring structure includes a wiring layer including wirings made mainly of copper. Wirings made mainly of copper in the first wiring structure are bonded with wirings made mainly of copper in the second wiring structure. The solid-state imaging device includes a pad formed of a conductive element made mainly of aluminum.
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