发明授权
US09395273B2 Microparticle detection system 有权
微粒检测系统

Microparticle detection system
摘要:
A particulate detection system (1) includes detection section (10), compressed air source (300) which includes compressor (301) for producing compressed air AK, compressor drive circuit (320) and control means (100). The detection section includes a gas jetting source (11). A drive condition for jetting air AR from jetting hole (31N) at a first flow rate Q1 is defined as a first drive condition JK1, and a drive condition for jetting the air AR at a second flow rate Q2 smaller than the first flow rate Q1 is defined as a second drive condition JK2. The control means includes first instruction means S5 for driving the compressor under the first drive condition JK1 when the quantity of the particulates S is detected, and second instruction means S6 for driving the compressor under the second drive condition JK2 when the quantity of the particulates S is not detected.
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