发明授权
- 专利标题: Magnification observation device
- 专利标题(中): 放大观察装置
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申请号: US13648571申请日: 2012-10-10
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公开(公告)号: US09383569B2公开(公告)日: 2016-07-05
- 发明人: Woobum Kang
- 申请人: Keyence Corporation
- 申请人地址: JP Osaka
- 专利权人: Keyence Corporation
- 当前专利权人: Keyence Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: Kilyk & Bowersox, P.L.L.C.
- 优先权: JP2011-227395 20111014
- 主分类号: G02B21/36
- IPC分类号: G02B21/36 ; G02B21/24 ; H04N5/232 ; G01N21/64
摘要:
Provided is a magnification observation device in which a focus of the imaging unit can be focused on the observation surface of the object in observation object region in a short period of time. An unit region of an observation object is imaged at a plurality of Z-positions by moving a object lens in the light-axis direction, the plurality of pieces of image data corresponding to the unit region are captured. An image of the observation object is displayed in the display unit as a navigation image. Shape data which indicates the position of the surface of the observation object in the unit region is generated. An observation object region on observation object is designated based on the navigation image. Based on the generated shape data, a focus of the object lens is on the surface of the observation object on the observation object region designated.
公开/授权文献
- US20130093872A1 Magnification Observation Device 公开/授权日:2013-04-18
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