Invention Grant
- Patent Title: MEMS microphone with reduced parasitic capacitance
- Patent Title (中): 具有降低寄生电容的MEMS麦克风
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Application No.: US13261875Application Date: 2011-11-14
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Publication No.: US09382109B2Publication Date: 2016-07-05
- Inventor: Leif Steen Johansen , Jan Tue Ravnkilde , Pirmin Hermann Otto Rombach , Kurt Rasmussen
- Applicant: Leif Steen Johansen , Jan Tue Ravnkilde , Pirmin Hermann Otto Rombach , Kurt Rasmussen
- Applicant Address: DE Munich
- Assignee: EPCOS AG
- Current Assignee: EPCOS AG
- Current Assignee Address: DE Munich
- Agency: Slater Matsil, LLP
- International Application: PCT/EP2011/070070 WO 20111114
- International Announcement: WO2013/071951 WO 20130523
- Main IPC: B81B3/00
- IPC: B81B3/00 ; H04R1/22 ; H04R19/00 ; H04R19/04 ; H04R31/00 ; B81C1/00
Abstract:
A MEMS microphone has reduced parasitic capacitance. The microphone includes a trench electrically separating an acoustically active section of a backplate from an acoustically inactive section of the backplate.
Public/Granted literature
- US20140346620A1 MEMS MICROPHONE WITH REDUCED PARASITIC CAPACITANCE Public/Granted day:2014-11-27
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