Invention Grant
- Patent Title: Reinforcement ring for carrier head
- Patent Title (中): 承载头加强环
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Application No.: US14163914Application Date: 2014-01-24
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Publication No.: US09381613B2Publication Date: 2016-07-05
- Inventor: Jamie Stuart Leighton , Stacy Meyer , Young J. Paik
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: B24B37/30
- IPC: B24B37/30 ; B24B41/06
Abstract:
A reinforcement ring is for placement in a carrier head to abut an inner surface of a perimeter portion of a flexible membrane. The reinforcement ring includes a substantially vertical cylindrical portion, a first flange projecting inwardly from the bottom of the cylindrical portion, and a second flange projecting outwardly from a bottom of the cylindrical portion. The second flange projects downwardly at a non-zero angle from vertical.
Public/Granted literature
- US20140273776A1 REINFORCEMENT RING FOR CARRIER HEAD Public/Granted day:2014-09-18
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