Invention Grant
- Patent Title: Method of forming bump pad structure having buffer pattern
- Patent Title (中): 形成具有缓冲图案的凸块焊盘结构的方法
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Application No.: US14514704Application Date: 2014-10-15
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Publication No.: US09368465B2Publication Date: 2016-06-14
- Inventor: Soo-Jae Park , Hyun-Suk Chun
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2014-0019893 20140220
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/00 ; H01L21/768

Abstract:
The method includes forming an upper layer on a lower layer, forming a metal interconnection in the upper layer, forming a passivation layer exposing a center part of the metal interconnection on the upper layer, forming a buffer pattern exposing the center part of the metal interconnection, and selectively and asymmetrically covering a peripheral region of the metal interconnect and a part of the passivation layer, forming a wrapping pattern covering the buffer pattern and exposing the center part of the metal interconnection on the passivation layer, and forming a pad pattern on the center part of the metal interconnection.
Public/Granted literature
- US20150235974A1 METHOD OF FORMING BUMP PAD STRUCTURE HAVING BUFFER PATTERN Public/Granted day:2015-08-20
Information query
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