Invention Grant
- Patent Title: Method for forming a semiconductor structure
- Patent Title (中): 半导体结构的形成方法
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Application No.: US14709488Application Date: 2015-05-12
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Publication No.: US09368365B1Publication Date: 2016-06-14
- Inventor: Shih-Hsun Kuo , Ting-Cheng Tseng , Tan-Ya Yin , Chia-Wei Huang , Ming-Jui Chen
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Science-Based Industrial Park, Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Science-Based Industrial Park, Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Main IPC: H01L21/30
- IPC: H01L21/30 ; H01L21/308

Abstract:
A manufacturing method for forming a semiconductor structure includes: first, a plurality of fin structures are formed on a substrate and arranged along a first direction, next, a first fin cut process is performed, so as to remove parts of the fin structures which are disposed within at least one first fin cut region, and a second fin cut process is then performed, so as to remove parts of the fin structures which are disposed within at least one second fin cut region, where the second fin cut region is disposed along at least one edge of the first fin cut region.
Information query
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