Invention Grant
- Patent Title: Device for controlling laser beam and apparatus for generating extreme ultraviolet light utilizing wavefront adjusters
- Patent Title (中): 用于控制激光束的装置和利用波前调节器产生极紫外光的装置
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Application No.: US14327401Application Date: 2014-07-09
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Publication No.: US09363878B2Publication Date: 2016-06-07
- Inventor: Masato Moriya , Osamu Wakabayashi
- Applicant: GIGAPHOTON INC.
- Applicant Address: JP Tochigi
- Assignee: GIGAPHOTON INC.
- Current Assignee: GIGAPHOTON INC.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: JP2012-003089 20120111; JP2012-268262 20121207
- Main IPC: H05G2/00
- IPC: H05G2/00 ; H01S3/13 ; H01S3/10 ; H01S3/00 ; G02B19/00 ; B23K26/06 ; G03F7/20 ; H01S3/23
Abstract:
A device is provided for controlling a laser beam. The device may include a first wavefront adjuster provided in a beam path of a laser beam outputted from a laser apparatus, a beam delivery unit provided in a beam path of the laser beam from the first wavefront adjuster, a second wavefront adjuster provided in a beam path of the laser beam from the beam delivery unit, a beam monitor provided in a beam path of the laser beam from the second wavefront adjuster, and a controller configured to control the first and second wavefront adjusters based on a detection result of the beam monitor. An extreme ultraviolet light apparatus including the device is also provided.
Public/Granted literature
- US20150334814A1 DEVICE FOR CONTROLLING LASER BEAM AND APPARATUS FOR GENERATING EXTREME ULTRAVIOLET LIGHT Public/Granted day:2015-11-19
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