发明授权
- 专利标题： Device for controlling laser beam and apparatus for generating extreme ultraviolet light utilizing wavefront adjusters
- 专利标题（中）： 用于控制激光束的装置和利用波前调节器产生极紫外光的装置
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申请号： US14327401申请日： 2014-07-09
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公开(公告)号： US09363878B2公开(公告)日： 2016-06-07
- 发明人: Masato Moriya , Osamu Wakabayashi
- 申请人： GIGAPHOTON INC.
- 申请人地址： JP Tochigi
- 专利权人： GIGAPHOTON INC.
- 当前专利权人： GIGAPHOTON INC.
- 当前专利权人地址： JP Tochigi
- 代理机构： Studebaker & Brackett PC
- 优先权： JP2012-003089 20120111; JP2012-268262 20121207
- 主分类号： H05G2/00
- IPC分类号： H05G2/00 ; H01S3/13 ; H01S3/10 ; H01S3/00 ; G02B19/00 ; B23K26/06 ; G03F7/20 ; H01S3/23
摘要：
A device is provided for controlling a laser beam. The device may include a first wavefront adjuster provided in a beam path of a laser beam outputted from a laser apparatus, a beam delivery unit provided in a beam path of the laser beam from the first wavefront adjuster, a second wavefront adjuster provided in a beam path of the laser beam from the beam delivery unit, a beam monitor provided in a beam path of the laser beam from the second wavefront adjuster, and a controller configured to control the first and second wavefront adjusters based on a detection result of the beam monitor. An extreme ultraviolet light apparatus including the device is also provided.
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