发明授权
- 专利标题： Liquid ejecting head, liquid ejecting apparatus, and piezoelectric element
- 专利标题（中）： 液体喷射头，液体喷射装置和压电元件
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申请号： US14496382申请日： 2014-09-25
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公开(公告)号： US09356222B2公开(公告)日： 2016-05-31
- 发明人: Tomohiro Sakai
- 申请人： Seiko Epson Corporation
- 申请人地址： JP
- 专利权人： Seiko Epson Corporation
- 当前专利权人： Seiko Epson Corporation
- 当前专利权人地址： JP
- 代理机构： Harness, Dickey & Pierce, P.L.C.
- 优先权： JP2013-200460 20130926; JP2014-128661 20140623
- 主分类号： B41J2/045
- IPC分类号： B41J2/045 ; H01L41/053 ; H01L41/187 ; B41J2/14 ; H01L41/08 ; H01L41/318 ; H01L41/319 ; B41J2/16
摘要：
A piezoelectric element which includes an adhesion layer made of composite oxide having perovskite structure including at least one of bismuth, manganese, iron, and titanium; a first electrode provided on the adhesion layer and made of metal preferentially oriented in a (100) face; a piezoelectric body layer provided on the first electrode and made of composite oxide having perovskite structure preferentially oriented in the (100) face; and a second electrode provided on the piezoelectric body layer.
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