发明授权
- 专利标题: Defect-less directed self-assembly
- 专利标题(中): 缺陷定向自组装
-
申请号: US14603927申请日: 2015-01-23
-
公开(公告)号: US09340411B2公开(公告)日: 2016-05-17
- 发明人: Anton J. deVilliers
- 申请人: Tokyo Electron Limited
- 申请人地址: JP Tokyo
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Tokyo
- 代理机构: Wood, Herron & Evans, LLP
- 主分类号: C08J5/18
- IPC分类号: C08J5/18 ; B81C1/00 ; H01L21/311
摘要:
Techniques herein enable executing directed self-assembly of block copolymer patterning processes that result in patterns having no defects or a negligibly low occurrence of defects to have a high yield of functional patterns and devices. Methods include executing a same DSA patterning sequence two or more times such that any defects in from a phase-separated first block copolymer film are corrected with a phase-separated second block copolymer film as any defect in the second block copolymer film would only temporarily cover a feature already created and/or transferred from first block copolymer film.
公开/授权文献
- US20150210812A1 Defect-less Directed Self-Assembly 公开/授权日:2015-07-30
信息查询