Invention Grant
US09334161B2 Processing liquid for suppressing pattern collapse of fine metal structure and method for producing fine metal structure using same
有权
用于抑制细金属结构的图案塌陷的处理液和使用其制造精细金属结构的方法
- Patent Title: Processing liquid for suppressing pattern collapse of fine metal structure and method for producing fine metal structure using same
- Patent Title (中): 用于抑制细金属结构的图案塌陷的处理液和使用其制造精细金属结构的方法
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Application No.: US13499462Application Date: 2010-09-29
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Publication No.: US09334161B2Publication Date: 2016-05-10
- Inventor: Masaru Ohto , Hiroshi Matsunaga , Kenji Yamada
- Applicant: Masaru Ohto , Hiroshi Matsunaga , Kenji Yamada
- Applicant Address: JP Tokyo
- Assignee: MITSUBISHI GAS CHEMICAL COMPANY, INC.
- Current Assignee: MITSUBISHI GAS CHEMICAL COMPANY, INC.
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2009-230478 20091002
- International Application: PCT/JP2010/066877 WO 20100929
- International Announcement: WO2011/040423 WO 20110407
- Main IPC: H01B13/00
- IPC: H01B13/00 ; B44C1/22 ; B81C1/00 ; C09K13/00 ; C23G1/26 ; H01L21/02
Abstract:
There are provided a processing liquid for suppressing pattern collapse of a fine metal structure, containing at least one member selected from an imidazolium halide having an alkyl group containing 12, 14 or 16 carbon atoms, a pyridinium halide having an alkyl group containing 14 or 16 carbon atoms, an ammonium halide having an alkyl group containing 14, 16 or 18 carbon atoms, a betaine compound having an alkyl group containing 12, 14 or 16 carbon atoms, and an amine oxide compound having an alkyl group containing 14, 16 or 18 carbon atoms, and a method for producing a fine metal structure using the same.
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