Invention Grant
- Patent Title: Template system and nano-imprint method using the same
- Patent Title (中): 模板系统和纳米压印方法使用相同
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Application No.: US13707690Application Date: 2012-12-07
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Publication No.: US09321213B2Publication Date: 2016-04-26
- Inventor: Ki-yeon Yang , Woong Ko , Jae-kwan Kim , Du-hyun Lee , Byung-kyu Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2012-0047126 20120503
- Main IPC: G03F7/00
- IPC: G03F7/00 ; B29C59/02
Abstract:
A template system, and a nano-imprint method using the same, include a template having a nano-pattern and configured to transfer the nano-pattern to a resin material on a substrate, and a pressure controlling apparatus configured to change a pressure of the template with respect to the substrate according to an intensity of bubbles captured between the substrate and the template.
Public/Granted literature
- US20130292865A1 TEMPLATE SYSTEM AND NANO-IMPRINT METHOD USING THE SAME Public/Granted day:2013-11-07
Information query
