发明授权
- 专利标题: Oxide semiconductor device
- 专利标题(中): 氧化物半导体器件
-
申请号: US13811227申请日: 2011-07-01
-
公开(公告)号: US09293597B2公开(公告)日: 2016-03-22
- 发明人: Hiroyuki Uchiyama , Hironori Wakana
- 申请人: Hiroyuki Uchiyama , Hironori Wakana
- 申请人地址: JP Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Miles & Stockbridge P.C.
- 优先权: JP2010-171818 20100730
- 国际申请: PCT/JP2011/065201 WO 20110701
- 国际公布: WO2012/014628 WO 20120202
- 主分类号: H01L29/86
- IPC分类号: H01L29/86 ; H01L29/786 ; H01L21/02 ; H01L27/12 ; H01L27/32
摘要:
Disclosed is a technique for suppressing fluctuation of device characteristics in thin film transistors using an oxide semiconductor film as a channel layer. In a thin film transistor using an oxide semiconductor film as a channel layer (4), said channel layer (4) is configured from an oxide semiconductor having as main materials a zinc oxide and tin oxide with introduced group IV elements or group V elements, wherein the ratio (A/B) of the impurity concentration (A) of the group IV elements or group V elements contained in the channel layer (4) and the impurity concentration (B) of the group III elements contained in the channel layer (4) satisfies A/B≦1.0, and ideally A/B≦0.3.
公开/授权文献
- US20130187154A1 OXIDE SEMICONDUCTOR DEVICE 公开/授权日:2013-07-25
信息查询
IPC分类: