Invention Grant
- Patent Title: Metal-insulator-metal capacitor under redistribution layer
- Patent Title (中): 再分布层下的金属 - 绝缘体 - 金属电容器
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Application No.: US13765015Application Date: 2013-02-12
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Publication No.: US09287347B2Publication Date: 2016-03-15
- Inventor: John J. Zhu , P R Chidambaram , Giridhar Nallapati , Choh fei Yeap
- Applicant: QUALCOMM Incorporated
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM INCORPORATED
- Current Assignee: QUALCOMM INCORPORATED
- Current Assignee Address: US CA San Diego
- Agency: Seyfarth Shaw LLP
- Main IPC: H01L29/49
- IPC: H01L29/49 ; H01L49/02 ; H01L23/64 ; H01L23/522

Abstract:
A metal-insulator-metal (MIM) capacitor reduces a number of masks and processing steps compared to conventional techniques. A first conductive layer of a MIM capacitor is deposited on a semiconductor chip and patterned using a MIM conductive layer mask. A conductive redistribution layer (RDL) is patterned over the MIM dielectric layer. The conductive redistribution layer includes two RDL nodes that overlap the first conductive layer of the MIM capacitor. A conductive via or bump extends through the MIM dielectric layer and couples one of the RDL nodes to the first conductive layer of the MIM capacitor.
Public/Granted literature
- US20140225224A1 METAL-INSULATOR-METAL CAPACITOR UNDER REDISTRIBUTION LAYER Public/Granted day:2014-08-14
Information query
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