发明授权
- 专利标题: Forming strained and relaxed silicon and silicon germanium fins on the same wafer
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申请号: US14031118申请日: 2013-09-19
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公开(公告)号: US09281381B2公开(公告)日: 2016-03-08
- 发明人: Veeraraghavan S. Basker , Bruce Doris , Ali Khakifirooz , Tenko Yamashita , Chun-chen Yeh
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Fleit Gibbons Gutman Bongini & Bianco PL
- 代理商 Thomas Grzesik
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L29/78 ; H01L21/84 ; H01L27/12
摘要:
Various embodiments form strained and relaxed silicon and silicon germanium fins on a semiconductor wafer. In one embodiment a semiconductor wafer is formed. The semiconductor wafer comprises a substrate, a dielectric layer, and a strained silicon germanium (SiGe) layer. At least one region of the strained SiGe layer is transformed into a relaxed SiGe region. At least one strained SiGe fin is formed from a first strained SiGe region of the strained SiGe layer. At least one relaxed SiGe fin is formed from a first portion of the relaxed SiGe region. Relaxed silicon is epitaxially grown on a second strained SiGe region of the strained SiGe layer. Strained silicon is epitaxially grown on a second portion of the relaxed SiGe region. At least one relaxed silicon fin is formed from the relaxed silicon. At least one strained silicon fin is formed from the strained silicon.
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