发明授权
- 专利标题: Particle-beam column corrected for both chromatic and spherical aberration
- 专利标题(中): 对于色差和球面像差校正的粒子束列
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申请号: US13849496申请日: 2013-03-23
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公开(公告)号: US09275817B2公开(公告)日: 2016-03-01
- 发明人: Frederick Wight Martin
- 申请人: Frederick Wight Martin
- 主分类号: H01J37/145
- IPC分类号: H01J37/145 ; H01J3/22 ; H01J37/141 ; H01J37/153 ; H01J3/12
摘要:
An objective lens for use in probe-forming particle-optical columns such as focused ion beam equipment, scanning electron microscopes, and helium microscopes is described. It comprises two interleaved (quadrupole/octopole) lenses and two or three ancillary octopole lenses, and is capable of simultaneous compensation of spherical (Cs) and chromatic (Cc) aberrations of the objective lens alone or of the complete particle-optical column. Additional apparatus comprising a gridded aperture and position-sensitive detector is specified, together with a method to measure and minimize all of the five independent third-order aberration coefficients of the objective lens.
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