发明授权
- 专利标题: Passivation of nonlinear optical crystals
- 专利标题(中): 钝化非线性光学晶体
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申请号: US13488635申请日: 2012-06-05
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公开(公告)号: US09250178B2公开(公告)日: 2016-02-02
- 发明人: Yung-Ho Chuang , Vladimir Dribinski
- 申请人: Yung-Ho Chuang , Vladimir Dribinski
- 申请人地址: US CA Milpitas
- 专利权人: KLA-Tencor Corporation
- 当前专利权人: KLA-Tencor Corporation
- 当前专利权人地址: US CA Milpitas
- 代理机构: Suiter Swantz pc llo
- 主分类号: G01N21/00
- IPC分类号: G01N21/00 ; G01N21/3563 ; C30B29/10 ; C30B33/00 ; C30B33/02 ; G01N21/59 ; G01N21/95 ; G01N21/35 ; G01N21/84 ; G01N21/88
摘要:
The present invention includes an exposure chamber configured to contain a passivating gas having a selected hydrogen concentration, the exposure chamber further configured to contain at least one NLO crystal for exposure to the passivating gas within the chamber, a passivating gas source fluidically connected to the exposure chamber, the passivating gas source configured to supply passivating gas to an interior portion of the exposure chamber, and a substrate configured to hold the NLO crystal within the chamber, the substrate further configured to maintain a temperature of the NLO crystal at or near a selected temperature, the selected temperature being below a melting temperature of the NLO crystal.
公开/授权文献
- US20130088706A1 HYDROGEN PASSIVATION OF NONLINEAR OPTICAL CRYSTALS 公开/授权日:2013-04-11
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