发明授权
- 专利标题: Printed circuit board multipole for ion focusing
- 专利标题(中): 用于离子聚焦的印刷电路板多极
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申请号: US12931272申请日: 2011-01-27
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公开(公告)号: US09230789B2公开(公告)日: 2016-01-05
- 发明人: Alexander Laue , Albrecht Glasmachers , Christian Hendrich , Dirk Preikszas , Michel Aliman , Hubert Mantz , Ulrike Zeile , Holger Dömer
- 申请人: Alexander Laue , Albrecht Glasmachers , Christian Hendrich , Dirk Preikszas , Michel Aliman , Hubert Mantz , Ulrike Zeile , Holger Dömer
- 申请人地址: DE Jena
- 专利权人: Carl Zeiss Microscopy GmbH
- 当前专利权人: Carl Zeiss Microscopy GmbH
- 当前专利权人地址: DE Jena
- 代理机构: Muirhead and Saturnell, LLC
- 优先权: DE102010001349 20100128
- 主分类号: H01J49/42
- IPC分类号: H01J49/42 ; H01J49/06 ; H01J49/14
摘要:
An apparatus for focusing and for storage of ions and an apparatus for separation of a first pressure area from a second pressure area are disclosed, in particular for an analysis apparatus for ions. A particle beam device may have at least one of the abovementioned apparatuses. A container for holding ions and at least one multipole unit are provided. The multipole unit has a through-opening with a longitudinal axis as well as a multiplicity of electrodes. A first set of the electrodes is at a first radial distance from the longitudinal axis. A second set of the electrodes is in each case at a second radial distance from the longitudinal axis. The first radial distance is less than the second radial distance. Alternatively or additionally, the apparatus may have an elongated opening with a radial extent. The opening has a longitudinal extent which is greater than the radial extent.
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