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US09219033B2 Via pre-fill on back-end-of-the-line interconnect layer 有权
通过预先填充在后端的互连层

Via pre-fill on back-end-of-the-line interconnect layer
摘要:
The present disclosure relates to a metal interconnect layer formed using a pre-fill process to reduce voids, and an associated method. In some embodiments, the metal interconnect layer has a dielectric layer disposed over a substrate. An opening with an upper portion above a horizontal plane and a lower portion below the horizontal plane extends downwardly through the dielectric layer. A first conductive layer fills the lower portion of the opening. An upper barrier layer is disposed over the first conductive layer covering bottom and sidewall surfaces of the upper portion of the opening. A second conductive layer is disposed over the upper barrier layer filling the upper portion of the opening.
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