发明授权
- 专利标题: Resist composition and method for producing resist pattern
- 专利标题(中): 抗蚀剂组合物和抗蚀剂图案的制造方法
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申请号: US13441205申请日: 2012-04-06
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公开(公告)号: US09176379B2公开(公告)日: 2015-11-03
- 发明人: Koji Ichikawa , Takahiro Yasue , Tatsuro Masuyama
- 申请人: Koji Ichikawa , Takahiro Yasue , Tatsuro Masuyama
- 申请人地址: JP Tokyo
- 专利权人: SUMITOMO CHEMICAL COMPANY, LIMITED
- 当前专利权人: SUMITOMO CHEMICAL COMPANY, LIMITED
- 当前专利权人地址: JP Tokyo
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 优先权: JP2011-085017 20110407
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G03F7/027 ; G03F7/20 ; G03F7/039
摘要:
A resist composition includes (A) a resin being insoluble or poorly soluble in alkali aqueous solution, but becoming soluble in an alkali aqueous solution by the action of an acid, (B) an acid generator having a structure to be cleaved by the action of an alkaline developer, and (C) a compound represented by the formula (I), wherein R1 and R2 in each occurrence independently represent a C1 to C12 hydrocarbon group, a C1 to C6 alkoxyl group, a C2 to C7 acyl group, a C2 to C7 acyloxy group, a C2 to C7 alkoxycarbonyl group, a nitro group or a halogen atom; m and n independently represent an integer of 0 to 4.
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