Invention Grant
- Patent Title: Gate structures and methods of manufacture
- Patent Title (中): 门结构和制造方法
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Application No.: US14504997Application Date: 2014-10-02
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Publication No.: US09171844B2Publication Date: 2015-10-27
- Inventor: Unoh Kwon , Ramachandran Muralidhar , Viorel Ontalus
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Hopewell Junction
- Assignee: GLOBALFOUNDRIES U.S. 2 LLC
- Current Assignee: GLOBALFOUNDRIES U.S. 2 LLC
- Current Assignee Address: US NY Hopewell Junction
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Yuanmin Cai
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H01L29/66 ; H01L27/092 ; H01L21/8238 ; H01L29/423

Abstract:
A metal gate structure with a channel material and methods of manufacture such structure is provided. The method includes forming dummy gate structures on a substrate. The method further includes forming sidewall structures on sidewalls of the dummy gate structures. The method further includes removing the dummy gate structures to form a first trench and a second trench, defined by the sidewall structures. The method further includes forming a channel material on the substrate in the first trench and in the second trench. The method further includes removing the channel material from the second trench while the first trench is masked. The method further includes filling remaining portions of the first trench and the second trench with gate material.
Public/Granted literature
- US20150014782A1 GATE STRUCTURES AND METHODS OF MANUFACTURE Public/Granted day:2015-01-15
Information query
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