发明授权
- 专利标题： Forming alignment mark and resulting mark
- 专利标题（中）： 形成对准标记和结果标记
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申请号： US13952231申请日： 2013-07-26
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公开(公告)号： US09136223B2公开(公告)日： 2015-09-15
- 发明人: Guoxiang Ning , Soon Yoeng Tan , Seok Yan Poh , Paul Ackmann
- 申请人： GLOBALFOUNDRIES Inc.
- 申请人地址： KY Grand Cayman
- 专利权人： GLOBALFOUNDRIES INC.
- 当前专利权人： GLOBALFOUNDRIES INC.
- 当前专利权人地址： KY Grand Cayman
- 代理机构： Ditthavong & Steiner, P.C.
- 主分类号： H01L21/70
- IPC分类号： H01L21/70 ; H01L23/544 ; G03F7/20 ; G03F1/42 ; G03F9/00
摘要：
Methods for forming an alignment mark and the resulting mark are disclosed. Embodiments may include forming a first shape having rotational symmetry; forming a second shape; and forming an alignment mark by combining the first shape and one or more of the second shape, wherein the alignment mark has rotational symmetry.
公开/授权文献
- US20150028500A1 FORMING ALIGNMENT MARK AND RESULTING MARK 公开/授权日：2015-01-29
信息查询
IPC分类:
